The government will drastically simplify procedures for bringing extreme ultraviolet (EUV) lithography equipment, used in core semiconductor processes, into Korea. Domestic semiconductor corporations such as Samsung Electronics and SK hynix will be able to cut the inspection period for importing the equipment from the current 34 days to 9 days, by up to 25 days.
The Ministry of Trade, Industry and Resources said on the 2nd that a partial amendment to the High‑Pressure Gas Safety Control Act enforcement decree containing these measures was approved at a Cabinet meeting. The core of the amendment is to change the classification so that EUV equipment is managed under standards for "specific facilities (products)" rather than the current "general high‑pressure gas manufacturing facilities."
EUV equipment uses extreme ultraviolet light with a wavelength of 13.5 nanometers (nm) to etch ultra‑fine circuits onto wafers, and ASML of the Netherlands is the only producer worldwide. Because the equipment includes high‑pressure gas piping and compressors inside, it has been classified by law as a "high‑pressure gas manufacturing facility," requiring complex procedures such as technical reviews and interim inspections each time it is installed.
Previously, bringing the equipment into the country took a total of 34 days in the order of technical review (15 days), permit (5 days), interim inspection (7 days), and completion inspection (7 days). The interim inspection is a pressure and leak‑tightness test conducted by an overseas accredited inspection body and cost about 500 million won per unit. With this amendment, the interim inspection will be omitted, and the technical review period and completion inspection period will each be reduced to 2 days, shortening the total time required to 9 days. The expense savings per unit are also expected to reach about 500 million won.
The Ministry of Trade and Industry (MOTI) said that by designating EUV equipment as "specific facilities" and conducting factory audits every three years along with comprehensive process inspections, it can verify manufacturers' quality control capabilities and secure a level of safety equivalent to the current regime.
The amendment also contains additional steps to rationalize regulations beyond EUV equipment. A tailored inspection standard has been newly established so that the eco‑friendly "liquid carbon dioxide cleaning system," which washes with carbon dioxide instead of water and detergent, can be commercialized in Korea for the first time. The criteria for appointing safety managers for low‑risk high‑pressure gas facilities have also been relaxed to reflect real‑world conditions.
The amendment is set to take effect immediately after promulgation next week. Minister Kim Jung-kwan of the Ministry of Trade and Industry (MOTI) said, "This legal amendment is a regulatory innovation case that simultaneously achieves safety and strengthens the competitiveness of advanced industries," adding, "We will continue to actively support investment in advanced industries through a rational safety management system that meets global standards."