Semes, a semiconductor equipment company, announced on the 1st that it has achieved a production and sales figure of 2,500 units for its semiconductor batch cleaning equipment, the first in Korea.
According to Semes, cumulative sales since the first mass production development in July 2006 have exceeded 7 trillion won.
Batch cleaning is a method that individually cleans semiconductor wafers one by one to remove particles (contaminants) remaining on the wafer surface as the circuit line width of semiconductor wafers becomes increasingly finer.
The company explained that these facilities have significantly improved cleaning performance by more than 90% compared to previous models by applying various materials and new technologies and have been designed to adjust the cleaning method according to the contamination status of the wafers.